Crystallization and Composition of Ni-C/Ti Multilayer with Varied Ni-C Thickness

Ni-C/Ti are suitable for the components of neutron supermirrors with high reflectivity because their excellent optical constant and smoother interfaces compared to Ni/Ti. In this paper, investigate mechanism C doping interface, crystallization, composition a multilayer variable Ni-C thickness, four multilayers were prepared by direct current magnetron sputtering, in which thickness layers was 1.5 nm, 2.5 3.5 4.5 respectively, Ti kept at 5 nm. The samples characterized XRD, XPS, HRTEM, EDX, SAED. XRD HRTEM results show that translate from amorphous polycrystal form, increasing crystallite size is equivalent layer respectively. SAED, EDX illustrate enrichment position evolves as respective increases evolution could be due lower standard Gibbs free energy TiC (−180.1 KJ/mol) NiTi (−37.3 Ni3Ti (−35.9 298 K.